Cover of Alexey Ivanov: Silicon Anodization as a Structuring Technique

Alexey Ivanov Silicon Anodization as a Structuring Technique

Literature Review, Modeling and Experiments

Price for Eshop: 1267 Kč (€ 50.7)

VAT 0% included

New

E-book delivered electronically online

E-Book information

Springer Fachmedien Wiesbaden

2017

PDF
How do I buy e-book?

978-3-658-19238-9

3-658-19238-0

Annotation

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Ask question

You can ask us about this book and we'll send an answer to your e-mail.