Levitation Micro-Systems
Applications to Sensors and Actuators
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Springer International Publishing
2020
EPub, PDF
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978-3-030-58908-0
3-030-58908-0
Annotation
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
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