Optical MEMS for Chemical Analysis and Biomedicine
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The Institution of Engineering and Technology
2016
EPub, PDF
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978-1-84919-898-1
1-84919-898-5
Annotation
Optical MEMS are micro-electromechanical systems merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale using integrated mechanical, optical, and electrical systems and hold great promise specifically in biomedical applications, among others.
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