Cover of Joachim Burghartz (EDT): Ultra-thin Chip Technology and Applications

Joachim Burghartz (EDT) Ultra-thin Chip Technology and Applications

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Springer New York

2010

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978-1-4419-7276-7

1-4419-7276-5

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Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.

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