Cover of Marc J. Madou: From MEMS to Bio-MEMS and Bio-NEMS

Marc J. Madou From MEMS to Bio-MEMS and Bio-NEMS

Manufacturing Techniques and Applications

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CRC Press

2011

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978-1-4398-9524-5

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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling la

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