Cover of Danny Banks: Microengineering, MEMS, and Interfacing

Danny Banks Microengineering, MEMS, and Interfacing

A Practical Guide

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CRC Press

2006

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978-1-4200-1541-6

1-4200-1541-9

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MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering

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