Cover of Donovan: Particle Control for Semiconductor Manufacturing

Donovan Particle Control for Semiconductor Manufacturing

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CRC Press

2018

EPub
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978-1-351-42574-2

1-351-42574-9

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There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

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